Canon's New KrF Scanner and ASML's Market Dominance

Canon recently announced the FPA-6400ES6a KrF lithography scanner featuring a 400 wafers-per-hour throughput and 4 nm matched machine overlay. The author argues that despite Canon's superior specs and lower price, ASML will likely maintain its dominance in the KrF market because ASML's tools share hardware and global matching parameters with its dominant immersion lithography systems. Open article →