[News] China’s SMEE Showcases Lithography Systems with 90%+ Localized Parts, Claims 10M+ Wafers Processed

China’s Shanghai Micro Electronics Equipment showcased its next-generation SSC800 KrF and SSB800 I-line lithography systems at the China International Import Expo, featuring over 90% localized parts. According to reports, the systems have entered large-scale mass production and are deployed at leading Chinese fabs, having collectively processed more than 10 million wafers. SMEE is currently China's only manufacturer capable of consistently delivering mass-produced front-end dry lithography systems. Open article →